JPH0165870U - - Google Patents
Info
- Publication number
- JPH0165870U JPH0165870U JP1987162148U JP16214887U JPH0165870U JP H0165870 U JPH0165870 U JP H0165870U JP 1987162148 U JP1987162148 U JP 1987162148U JP 16214887 U JP16214887 U JP 16214887U JP H0165870 U JPH0165870 U JP H0165870U
- Authority
- JP
- Japan
- Prior art keywords
- molecular beam
- crystal growth
- growth apparatus
- liquid nitrogen
- reflection
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 6
- 239000013078 crystal Substances 0.000 claims description 4
- 238000010894 electron beam technology Methods 0.000 claims description 3
- 239000007788 liquid Substances 0.000 claims description 3
- 229910052757 nitrogen Inorganic materials 0.000 claims description 3
- 238000000097 high energy electron diffraction Methods 0.000 claims 2
- 239000000758 substrate Substances 0.000 description 1
Landscapes
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16214887U JPH0437909Y2 (en]) | 1987-10-22 | 1987-10-22 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16214887U JPH0437909Y2 (en]) | 1987-10-22 | 1987-10-22 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0165870U true JPH0165870U (en]) | 1989-04-27 |
| JPH0437909Y2 JPH0437909Y2 (en]) | 1992-09-04 |
Family
ID=31445710
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16214887U Expired JPH0437909Y2 (en]) | 1987-10-22 | 1987-10-22 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0437909Y2 (en]) |
-
1987
- 1987-10-22 JP JP16214887U patent/JPH0437909Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0437909Y2 (en]) | 1992-09-04 |
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